|
1) Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch - Journal of Vacuum Science & Technology B - 2024
2) Electron beam lithography on nonplanar and irregular surfaces - Microsystems & Nanoengineering - 2024
3) Effect of Triton X-100 surfactant and agitation on tetramethylammonium hydroxide wet etching for microneedle fabrication - Journal of Vacuum Science & Technology B - 2024
4) Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications - Journal of Vacuum Science & Technology B - 2024
5) Fabrication of slanted gratings by using glancing angle deposition - Journal of Vacuum Science & Technology B - 2024
6) Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask - IEEE Transactions on Semiconductor Manufacturing - 2024
7) High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures”, 22, 100234 (2024). - Micro and Nano Engineering - 2024
8) Edge lithography based on aluminum dry etching - Micro and Nano Engineering - 2024
|
